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Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages

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Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages Cover

 

Synopses & Reviews

Publisher Comments:

The Chemical Vapor Deposition (CVD) process, one of the most important technological developments in the past decade, has made production of high quality diamond coatings on preshaped parts and synthesis of freestanding shapes of diamond a reality. Epitaxial diamond has been grown on diamond and cubic-BN. Poly-crystalline diamond films have been deposited on various non-diamond substrates, including insulators, semiconductors and metals, ranging from single crystals to amorphous materials. However further technological development in CVD of diamond films, particularly in such challenging areas as single-crystal growth for electronic applications and low-temperature deposition for coating on optic and plastic materials, requires a detailed understanding and effective control of the fundamental phenomena associated with diamond nucleation and growth. These phenomena, especially the nucleation and early growth stages, critically determine film properties, morphology, homogeneity, defect formation, adhesion, and the type of substrates that can be successfully coated.

This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academic and industry community with the latest developments in this growing field. The scope of the book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and review of thevarious processing techniques used. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described. Finally, theoretical and modeling studies on surface nucleation are reviewed.

Synopsis:

The scope of the present book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and a review of the various processing techniques used in diamond CVD. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described.

Synopsis:

This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing field.

About the Author

Huimin Liu is assistant professor in the Department of Chemical Engineering, Colorado State University, Fort Collins, Colorado.

Table of Contents

General Introduction — Atomic and Crystal Structures of Diamond — Diamond CVD Techniques — Diamond Nucleation Mechanisms — Effects of Surface Conditions on Diamond Nucleation — Effects of Deposition Conditions on Diamond Nucleation — Theoretical and Modeling Studies on Diamond Nucleation — References — Index.

Product Details

ISBN:
9780080946184
Publisher:
William Andrew
Subject:
Technology & Engineering : Metallurgy
Author:
Liu, Huimin
Author:
Dandy, David S.
Author:
Haber, David S.
Author:
Huimin Liu
Author:
David S. Dandy
Subject:
Diamonds, artificial
Subject:
Chemical vapor deposition
Subject:
Engineering - Chemical & Biochemical
Subject:
Industrial Technology
Subject:
Chemical & Biochemical
Subject:
Electronics - Microelectronics
Subject:
Chemistry-Chemical Engineering
Subject:
Metal-Metallurgy
Subject:
Science Reference-General
Subject:
Technology & Engineering : Electronics - Microelectronics
Subject:
main_subject
Subject:
all_subjects
Subject:
Technology & Engineering : Material Science
Publication Date:
December 1996
Binding:
eBooks
Language:
English
Pages:
206

Related Subjects

Engineering » Metal » Metallurgy
Reference » Science Reference » Technology
Science and Mathematics » Chemistry » Chemical Engineering
Science and Mathematics » Electricity » General Electronics
Science and Mathematics » Materials Science » General

Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages
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Product details 206 pages Noyes Publications - English 9780080946184 Reviews:
"Synopsis" by , The scope of the present book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and a review of the various processing techniques used in diamond CVD. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described.
"Synopsis" by , This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing field.
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