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Original Essays | September 15, 2014

Lois Leveen: IMG Forsooth Me Not: Shakespeare, Juliet, Her Nurse, and a Novel



There's this writer, William Shakespeare. Perhaps you've heard of him. He wrote this play, Romeo and Juliet. Maybe you've heard of it as well. It's... Continue »
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    Juliet's Nurse

    Lois Leveen 9781476757445

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Tribology in Chemical-Mechanical Planarization

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Tribology in Chemical-Mechanical Planarization Cover

 

Synopses & Reviews

Publisher Comments:

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is suitable for tribology professionals as well as chemists, materials scientists, physicists, and other applied scientists and engineers in fields of semiconductors and microelectronics. The first half of the book is devoted to CMP, while the other focuses on the fundamentals of tribology. As the first source to integrate CMP and tribology, the book illustrates the important role that these fields play in manufacturing and technological development. It follows with an examination of tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects. Other topics covered in depth include basics of friction, flash temperature, lubrication fundamentals, basics of wear, polishing particles, and pad wear. The book concludes its focus with CMP practices, discussing mechanical aspects, pad materials, elastic modulus, and cell buckling. Expanding upon the science and technology of tribology to improve the reliability, maintenance, and wear of technical equipment and other material applications, Tribology in Chemical-Mechanical Planarization provides scientists and engineers with clear foresight to the future of this technology.

Product Details

ISBN:
9781420028393
Publisher:
Taylor & Francis
Subject:
Power Tools
Author:
Craven, David R.
Author:
Liang, Hong
Subject:
Engineering - General
Subject:
Material Science
Subject:
Tribology
Subject:
Grinding and polishing
Subject:
Home Construction-Tools
Subject:
main_subject
Subject:
all_subjects
Publication Date:
20050301
Binding:
ELECTRONIC
Language:
English
Pages:
185

Related Subjects

Engineering » Engineering » General Engineering
Engineering » Home Construction » Tools
Engineering » Mechanical Engineering » General
Reference » Science Reference » Technology
Science and Mathematics » Chemistry » General
Science and Mathematics » Electricity » General Electronics
Science and Mathematics » Materials Science » General

Tribology in Chemical-Mechanical Planarization
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Product details 185 pages Taylor & Francis - English 9781420028393 Reviews:
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