Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining. Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

Micro and Nano Manufacturing will address the need to provide a comprehensive text on established and unestablished micro and nano fabrication techniques. The book's aims and scope will focus on providing the academic and industrial communities with a single source of micro and nano fabrication techniques applied to a variety of engineering materials. The book will differ from existing textbooks in the same area by addressing the needs of micro and nano manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials, including silicon:   the book will not exclusively consider silicon-based materials as the basis for the construction of micro systems.

The advent of nanotechnology has now progressed to a point where nanodevices are moving beyond the laboratory and into the production cycle. Hence their is now a need for a practical hands-on book that describes the micro and nanofabrication techniques in a single volume.

Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and a Visiting Professor at Tennessee Technological University (an associated university of Oak Ridge National Laboratory), Faculty Associate at Oak Ridge National Laboratory, Faculty Associate at the Birck Nanotechnology Center, Center for Collaborative Manufacturing, Center for the Management of Manufacturing Enterprises, Center for Advanced Manufacturing, and Center for Laser-based Manufacturing at Purdue, and a Visiting Fellow at the University of Liverpool, U.K.Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A., U. S. Department of Energy (through Oak Ridge National Laboratory), Y12 National Security Complex at Oak Ridge, Tennessee, and Industrial Companies, which has generated research income in excess of 10 million ($14 million).Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.

Principles of Micro- and Nanofabrication.- Microfabriaction Using X-Ray Lithography.- Manufacturing High Aspect Ration Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Micro Cutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.