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On Order $276.25
New Hardcover
Currently out of stock.
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Handbook of Silicon Semiconductor Metrologyby Alain C. Diebold
Synopses & ReviewsPublisher Comments:Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies. Book News Annotation:A reference for people in both the metrology and processing
communities who are engaged in research, development, or
manufacturing. When possible the scientists and engineers writing the
chapters have described the underlying science of measurement as well
as its application to current materials and processes. They cover
transistor fabrication metrology, on-chip interconnect metrology,
lithography metrology, detecting and characterizing defects, sensor-
based metrology, data management, electrical measurement-based
statistical metrology, and key measurement and calibration technology.
Annotation c. Book News, Inc., Portland, OR (booknews.com) Synopsis:A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods. What Our Readers Are SayingBe the first to add a comment for a chance to win!Product Details
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