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Laser Processing of Thin Films & Microstructures: Oxidation, Deposition and Etching of Insulators

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Laser Processing of Thin Films & Microstructures:  Oxidation, Deposition and Etching of Insulators Cover

 

Product Details

ISBN:
9780387179513
Subtitle:
(oxidation, deposition, and etching of insulators )
Publisher:
Springer-Verlag
Location:
Berlin ;
Subject:
Lasers
Subject:
Lasers -- Industrial applications.
Edition Description:
Bibliography: p. 287-313.
Series Volume:
3
Publication Date:
c1987
Illustrations:
Yes
Pages:
viii, 320 p.

Related Subjects

Science and Mathematics » Physics » Thin Films

Laser Processing of Thin Films & Microstructures: Oxidation, Deposition and Etching of Insulators
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Product details viii, 320 p. pages Springer-Verlag New York, Incorporated - English 9780387179513 Reviews:
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