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Aimed at senior-level and graduate courses in ULSI technology, this text covers such topics as: clean-room technology; wafer-cleaning technology; epitaxy; conventional and rapid thermal process; and lithography.
"Synopsis"
by Gardners,
Aimed at senior-level and graduate courses in ULSI technology, this text covers such topics as: clean-room technology; wafer-cleaning technology; epitaxy; conventional and rapid thermal process; and lithography.
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