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Original Essays | September 15, 2014

Lois Leveen: IMG Forsooth Me Not: Shakespeare, Juliet, Her Nurse, and a Novel



There's this writer, William Shakespeare. Perhaps you've heard of him. He wrote this play, Romeo and Juliet. Maybe you've heard of it as well. It's... Continue »
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Semiconductor Manufacturing Technology

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Semiconductor Manufacturing Technology Cover

ISBN13: 9780130815200
ISBN10: 0130815209
Condition:
All Product Details

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Synopses & Reviews

Publisher Comments:

This book is written for students in two- and four-year technology programs at community colleges and universities. Chapters are organized around the broad technologies applicable to semiconductor manufacturing.

Chapters 1 to 8 present fundamental technical information relevant to semiconductor manufacturing. Chapter 9 presents a process model overview with a general flowchart that links the major areas in wafer fabrication. Chapters 10 to 19 cover each of the major processes. Each process chapter concludes with a summary of quality measures and troubleshooting issues to provide the student with practical challenges encountered during wafer fabrication. Chapter 20 provides an overview of the back-end process for IC assembly and packaging.

Academic and industry reviewers have applauded this book as the most comprehensive and up-to-date text currently available in the market.

Synopsis:

An introduction to the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated semiconductors. The book provides technical information and strikes a balance between the process and equipment technology found in wafer fabrications.

Synopsis:

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

Table of Contents

 1. Introduction to the Semiconductor Industry.

 2. Characteristics of Semiconductor Materials.

 3. Device Technologies.

 4. Silicon and Wafer Preparation.

 5. Chemicals in Semiconductor Fabrication.

 6. Contamination Controls in Wafer Fabs.

 7. Metrology and Defect Inspection.

 8. Gas Control in Process Chambers.

 9. IC Fabrication Process Overview.

10. Oxidation.

11. Deposition.

12. Metallization.

13. Photolithography: Vapor Prime to Soft Bake.

14. Photolithography: Alignment and Exposure.

15. Photolithography: Photoresist Development and Advanced Lithography.

16. Etch.

17. Ion Implant.

18. Chemical Mechanical Planarization.

19. Wafer Test.

20. Assembly and Packaging.

Appendices.

Glossary.

Index.

What Our Readers Are Saying

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Average customer rating based on 1 comment:

kyler1230, October 8, 2013 (view all comments by kyler1230)
It is a great book that taught me the basics of Semiconductor Tech. It does not use a lot of complicated terms and taught me a lot during my first MT class.
Was this comment helpful? | Yes | No

Product Details

ISBN:
9780130815200
Author:
Quirk, Michael
Publisher:
Prentice Hall
Author:
Serda, Julian
Location:
Upper Saddle River, N.J.
Subject:
Engineering - Electrical & Electronic
Subject:
Electronics - Semiconductors
Subject:
Semiconductors
Subject:
Equipment, Appliances & Supplies
Subject:
Electronic industries
Subject:
Electricity
Subject:
Electronics - General
Subject:
Semiconductors -- Design and construction.
Subject:
Manufacturing
Subject:
Industrial Technology
Subject:
Electricity-General Electronics
Copyright:
Edition Description:
Trade paper
Series Volume:
107-41
Publication Date:
November 2000
Binding:
TRADE PAPER
Grade Level:
College/higher education:
Language:
English
Illustrations:
Yes
Pages:
666
Dimensions:
11 x 8.3 x 1.9 in 1538 gr

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Related Subjects

Reference » Science Reference » Technology
Science and Mathematics » Electricity » General Electronics
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Textbooks » General

Semiconductor Manufacturing Technology New Trade Paper
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$248.50 In Stock
Product details 666 pages Prentice Hall - English 9780130815200 Reviews:
"Synopsis" by , An introduction to the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated semiconductors. The book provides technical information and strikes a balance between the process and equipment technology found in wafer fabrications.
"Synopsis" by , In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.
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