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Physics of Submicron Lithography

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Physics of Submicron Lithography Cover

 

Synopses & Reviews

Publisher Comments:

This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

Book News Annotation:

A new stage in the development of microelectronics is connected with converting to devices of submicron size; processing materials into such small devices is possible with electron, ion, and x-ray lithographic methods--and this, according to Valiev (Academy of Sciences of the USSR), ". . . will unconditionally be the most important achievement in science and technology for the last quarter of the 20th century." The information presented here is for specialists in microelectronics who must equip, or reequip, themselves with knowledge of the physics of electron and ion beams and x-ray and ultraviolet radiation, including forming the beams and their interactions with matter.
Annotation c. Book News, Inc., Portland, OR (booknews.com)

Table of Contents

Forming Electron Beams of Submicron Cross Section. The Physics of the Interactions Between Fast Electrons and Matter. The Physics of Ion Beam Lithography. The Physics of X-Ray Microlithography. Optical Lithography. Proceedures for Processing Exposed Resist Films and Resist Mask Topography. Index.

Product Details

ISBN:
9780306435782
Author:
Valiev, Kamil A.
Publisher:
Springer
Author:
Valiev, Kamil' Akhmetovich
Location:
New York :
Subject:
Physics
Subject:
Lithography, Electron beam.
Subject:
X-ray lithography.
Subject:
Ion beam lithography.
Subject:
Optics
Subject:
Material Science
Subject:
Solid State Physics
Subject:
Spectroscopy and Microscopy
Subject:
Condensed matter physics
Subject:
Crystallography
Subject:
Electrical engineering
Subject:
Optical and Electronic Materials
Subject:
Physics-Optics
Copyright:
Edition Description:
Book
Series:
Microdevices
Series Volume:
145
Publication Date:
19920331
Binding:
HARDCOVER
Language:
English
Illustrations:
Yes
Pages:
504
Dimensions:
248 x 165 mm 2600 gr

Related Subjects

Health and Self-Help » Health and Medicine » General
Health and Self-Help » Health and Medicine » General Medicine
Health and Self-Help » Health and Medicine » Medical Specialties
Science and Mathematics » Chemistry » Biochemistry
Science and Mathematics » Materials Science » General
Science and Mathematics » Physics » Crystallography
Science and Mathematics » Physics » General
Science and Mathematics » Physics » Optics
Science and Mathematics » Physics » Solid State Physics

Physics of Submicron Lithography New Hardcover
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Product details 504 pages Plenum Publishing Corporation - English 9780306435782 Reviews:
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