We Need Diverse Ya Sale
 
 

Special Offers see all

Enter to WIN a $100 Credit

Subscribe to PowellsBooks.news
for a chance to win.
Privacy Policy

Visit our stores


    Recently Viewed clear list


    Lists | June 22, 2015

    Stephen Jarvis: IMG Robert Seymour — 13 Pictures



    1. Self-Portrait. My new novel, Death and Mr. Pickwick, tells the story of the origins of Charles Dickens's first novel, The Pickwick Papers. Its... Continue »
    1. $21.00 Sale Hardcover add to wish list

      Death and Mr. Pickwick

      Stephen Jarvis 9780374139667

    spacer
Qualifying orders ship free.
$171.50
New Hardcover
Ships in 1 to 3 days
Add to Wishlist
available for shipping or prepaid pickup only
Available for In-store Pickup
in 7 to 12 days
Qty Store Section
25 Remote Warehouse Artificial Intelligence- Fuzzy Logic

Other titles in the Materials Science and Process Technology series:

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series)

by

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series) Cover

 

Synopses & Reviews

Publisher Comments:

This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.

Book News Annotation:

Draws from the literature of the past decade, and unpublished original research findings, to present the background necessary for setting up, fine tuning, and maintaining a chemical vapor deposition process for tungsten, at a production volume. For readers with a background in basic physics and chemistry, explains the materials, deposition chemistry, equipment, process technology, emerging developments, and applications.
Annotation c. Book News, Inc., Portland, OR (booknews.com)

Table of Contents

Introduction

The Blanket Tungsten Approach

The Selective Tungsten Approach

Blanket Versus Selective Tungsten

Tungsten as Interconnect Material

The Chemistry of CVD-W and Properties of Tungsten

The Deposition Equipment

Miscellaneous

Chemical Vapor Deposition of Tungsten Silicide

References

Author Index

Subject Index

Appendix: Unit Cells of W and WSi2

Product Details

ISBN:
9780815512882
Author:
Schmitz, John E.
Publisher:
William Andrew
Author:
Schmitz, John E. J.
Location:
Park Ridge, N.J., U.S.A. :
Subject:
General
Subject:
Engineering - Electrical & Electronic
Subject:
Materials
Subject:
Logic Design
Subject:
Integrated circuits
Subject:
Vapor-plating
Subject:
Tungsten
Subject:
Integrated circuits -- Ultra large scale integration -- Materials.
Subject:
Electricity
Subject:
Electronics - Microelectronics
Subject:
Artificial Intelligence - Fuzzy Logic
Edition Description:
Includes bibliographical references and index.
Series:
Materials Science and Process Technology Series
Series Volume:
no. AGES 9063
Publication Date:
19930131
Binding:
HARDCOVER
Language:
English
Illustrations:
Yes
Pages:
251
Dimensions:
9 x 6 in

Related Subjects

Computers and Internet » Artificial Intelligence » Fuzzy Logic
Reference » Science Reference » Technology
Science and Mathematics » Electricity » General Electricity
Science and Mathematics » Electricity » General Electronics
Science and Mathematics » Environmental Studies » Environment

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series) New Hardcover
0 stars - 0 reviews
$171.50 In Stock
Product details 251 pages Noyes Data Corporation/Noyes Publications - English 9780815512882 Reviews:
spacer
spacer
  • back to top

FOLLOW US ON...

     
Powell's City of Books is an independent bookstore in Portland, Oregon, that fills a whole city block with more than a million new, used, and out of print books. Shop those shelves — plus literally millions more books, DVDs, and gifts — here at Powells.com.