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Handbook of Ellipsometry

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Handbook of Ellipsometry Cover

 

Synopses & Reviews

Publisher Comments:

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale.

With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.

Book News Annotation:

Fifteen contributors in industry and universities in the US, Sweden, Germany, and the Czech Republic have written on the latest developments and applications of ellipsometry. The theory of ellipsometry, the optical physics of materials, and data analysis for spectroscopic ellipsometry are described at length. Subsequent chapters concern instrumentation, including the optical components and the simple PCSA ellipsometer, the rotating polarizer and analyzer, polarization modulation, and multichannel methods. Current applications are described for SiO2 films (by Eugene A. Irene of the U. of North Carolina) and for generalized ellipsometry (by Mathias Schubert of the U. Leipzig in Germany) in chapters that include discussion of theory. New developments such as VUV ellipsometry, spectroscopic infrared, and applications in the life sciences are the topics of the final chapters. Each chapter concludes with a bibliography.
Annotation ©2004 Book News, Inc., Portland, OR (booknews.com)

Synopsis:

The first, comprehensive handbook on the foundations and modern applications of ellipsometry, a measurement technique based on phase and amplitude changes in polarized light. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale.This book provides a much needed foundation for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.

Table of Contents

PART 1: THEORY OF ELLIPSOMETRY

Polarized Light and Ellipsometry

Optical Physics of Materials

Data Analysis for Spectroscopic Ellipsometry

PART 2: INSTRUMENTATION

Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer

Rotating Polarizer and Analyzer Ellipsometry

Polarization Modulation Ellipsometry

Multichannel Ellipsometry

PART 3: APPLICATIONS

SiO2 Films

Theory and Application of Generalized Ellipsometry

PART 4: EMERGING AREAS

VUV Ellipsometry

Spectroscopic Infrared Ellipsometry

Ellipsometry in Life Sciences

Index

Product Details

ISBN:
9780815514992
Author:
Tompkins, Harland
Publisher:
William Andrew
Author:
Haber, Eugene A.
Author:
Irene, Eugene
Subject:
Material Science
Subject:
Light
Subject:
Nanostructures
Subject:
Nanotechnology
Subject:
Ellipsometry.
Subject:
Mensuration
Subject:
Materials Science-General
Series:
Materials Science and Process Technology
Publication Date:
20060131
Binding:
HARDCOVER
Language:
English
Illustrations:
Y
Pages:
886
Dimensions:
9 x 6 in

Related Subjects

History and Social Science » Law » General
History and Social Science » Politics » General
Reference » Science Reference » General
Reference » Science Reference » Technology
Science and Mathematics » Materials Science » General

Handbook of Ellipsometry New Hardcover
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$348.75 In Stock
Product details 886 pages Noyes Data Corporation/Noyes Publications - English 9780815514992 Reviews:
"Synopsis" by , The first, comprehensive handbook on the foundations and modern applications of ellipsometry, a measurement technique based on phase and amplitude changes in polarized light. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale.This book provides a much needed foundation for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
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