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Handbook of Ellipsometryby Harland Tompkins
Synopses & Reviews
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale.
With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Book News Annotation:
Fifteen contributors in industry and universities in the US, Sweden, Germany, and the Czech Republic have written on the latest developments and applications of ellipsometry. The theory of ellipsometry, the optical physics of materials, and data analysis for spectroscopic ellipsometry are described at length. Subsequent chapters concern instrumentation, including the optical components and the simple PCSA ellipsometer, the rotating polarizer and analyzer, polarization modulation, and multichannel methods. Current applications are described for SiO2 films (by Eugene A. Irene of the U. of North Carolina) and for generalized ellipsometry (by Mathias Schubert of the U. Leipzig in Germany) in chapters that include discussion of theory. New developments such as VUV ellipsometry, spectroscopic infrared, and applications in the life sciences are the topics of the final chapters. Each chapter concludes with a bibliography.
Annotation ©2004 Book News, Inc., Portland, OR (booknews.com)
The first, comprehensive handbook on the foundations and modern applications of ellipsometry, a measurement technique based on phase and amplitude changes in polarized light. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale.This book provides a much needed foundation for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
Table of Contents
PART 1: THEORY OF ELLIPSOMETRY
Polarized Light and Ellipsometry
Optical Physics of Materials
Data Analysis for Spectroscopic Ellipsometry
PART 2: INSTRUMENTATION
Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
Rotating Polarizer and Analyzer Ellipsometry
Polarization Modulation Ellipsometry
PART 3: APPLICATIONS
Theory and Application of Generalized Ellipsometry
PART 4: EMERGING AREAS
Spectroscopic Infrared Ellipsometry
Ellipsometry in Life Sciences
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