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Other titles in the Optical Science and Engineering series:
Optical Inspection of Microsystems (Optical Science and Engineering)by Wolfgang Osten
Synopses & Reviews
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.
Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moir techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts.
Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Book News Annotation:
Complex devices are now being made so small that conventional methods of testing them do not work. Researchers of very tiny things, and of various imaging techniques, describe a family of full-field optical methods that may solve the problem because of their fast response potential, high sensitivity and accuracy, high resolution of data points, automatic analysis of results, and data processing to meet requirements of the testing model being used. They review the research into applying optical measurement techniques to inspecting microsystems and survey some of the major methods, including light scattering, scanning probe microscopy, fringe projection, and laser Doppler vibrometry. Annotation ©2007 Book News, Inc., Portland, OR (booknews.com)
High quality standards are particularly troublesome for MEMS designers, where products used in medicine and safety technology are held to extremely stringent standards. Manufacturers of microsystems need measurement and inspection techniques that are fast, robust, and low cost relative to the cost of the product being developed. Optical Inspection of Microsystems offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.
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