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Introduction to Microsystem Design (Rwthedition)

Introduction to Microsystem Design (Rwthedition) Cover

 

Synopses & Reviews

Publisher Comments:

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

Synopsis:

Introduction to Microsystem Design describes both the design of micro systems and the equations needed to estimate basic elements. The text can be referenced quickly via equation tables, which are found in an index at the end of the book.

About the Author

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

Table of Contents

Preface.- Notations and symbols.- Introduction.- Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies between physical domains.- Mechanical devices for electronics.- Pressure sensors.- Flow sensors.- Inertial sensors.

Product Details

ISBN:
9783642194887
Publisher:
Springer
Location:
Berlin, Heidelberg
Author:
Schomburg, Werner Karl
Subject:
Nanotechnology
Subject:
Basic elements and effects
Subject:
Chracteristic curves
Subject:
Microsystem Design
Subject:
Systematic tables of equations
Subject:
Nanotechnology and Microengineering
Subject:
Optical and Electronic Materials
Subject:
Applied and Technical Physics
Subject:
Circuits and Systems
Subject:
Science Reference-Technology
Subject:
Engineering
Subject:
Language, literature and biography
Subject:
Optical materials
Subject:
Systems engineering
Copyright:
Edition Description:
2011
Series:
RWTHedition
Publication Date:
20110629
Binding:
HARDCOVER
Language:
English
Pages:
200
Dimensions:
235 x 155 mm

Related Subjects

Reference » Science Reference » General
Reference » Science Reference » Technology
Science and Mathematics » Electricity » General Electronics

Introduction to Microsystem Design (Rwthedition)
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$ In Stock
Product details 200 pages Springer - English 9783642194887 Reviews:
"Synopsis" by , Introduction to Microsystem Design describes both the design of micro systems and the equations needed to estimate basic elements. The text can be referenced quickly via equation tables, which are found in an index at the end of the book.
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