Synopses & Reviews
Secondary Ion Mass Spectrometry (SIMS) has become an indispensible, fully commercialized micro-analytical technique applied in a diverse range of fields spanning the Materials Sciences, Earth sciences and Bio-Sciences with new application field continually being uncovered. This book provides a pedagogic function as well as a research tool to anyone involved in any of these forms of SIMS (senior undergraduates through seasoned professionals within academia or industry).
This book does so by supplying a clear and definitive introduction to:
a) The fundaments of sputtering and secondary ion formation/survival inclusive of pertinent models for elemental and molecular emission
b) Both the theory and application, inclusive of modes of operation, of the latest instrumentation used in Static SIMS, Dynamic SIMS or Cluster SIMS
c) Data collection and processing protocols along with reasons for any distortions that can be introduced
Amalgamation of theory with experimental data from a practitioner’s perspective is the core feature of this book. This is aided through the use of numerous illustrations from highly diverse fields are included. All sections are prepared such that each can be read independently of each other. Commonly used reference tables, review questions, vendors and contacts and descriptions of related techniques presented in the Appendix.
Synopsis
Serves as a practical reference for those involved in Secondary Ion Mass Spectrometry (SIMS)
• Introduces SIMS along with the highly diverse fields (Chemistry, Physics, Geology and Biology) to it is applied using up to date illustrations
• Introduces the accepted fundamentals and pertinent models associated with elemental and molecular sputtering and ion emission
• Covers the theory and modes of operation of the instrumentation used in the various forms of SIMS (Static vs Dynamic vs Cluster ion SIMS)
• Details how data collection/processing can be carried out, with an emphasis placed on how to recognize and avoid commonly occurring analysis induced distortions
• Presented as concisely as believed possible with All sections prepared such that they can be read independently of each other
About the Author
Paul van der Heide is a recognized leader in surface analysis with emphasis on the application of Secondary Ion Mass Spectrometry (SIMS). This interest started during his PhD (completed in 1992 at the University of Auckland) which involved the design and construction of a magnetic sector SIMS instrument. Paul has since been heavily involved in the application and development of SIMS at the University of Western Ontario, the University of Houston (where he also filled in various Professor level positions), Samsung Austin Semiconductor, and most recently at GlobalFoundries (NY). Paul has ~100 publications with this representing his 2nd book.
Table of Contents
Forward x
Preface xi
Acknowledgements xiv
List of physical constants xiv
Chapter 1: Introduction
1.1 Matter and the Mass Spectrometer
1.2 Secondary Ion Mass Spectrometry
1.3 Summary
Section I
Chapter 2: Properties of atoms, ions, molecules and solids
2.1 The Atom
2.2 Electronic structure of atoms and ions
2.3 Summary
Chapter 3: Current understanding of sputtering and ion formation
3.1 The fundamentals of SIMS
3.2 Sputtering
3.3 Ionization/neutralization
3.4 Summary
Section II
Chapter 4: Instrumentation
4.1 The science of measurement
4.2 Hardware
4.3 Summary
Chapter 5: Data collection
5.1 The art of measurement
5.2 Sample preparation and handling
5.3 Data collection
5.4 Data conversion
5.5 Summary
Appendix
i) Periodic table of the elements
ii) Isotope masses, natural isotope abundances, atomic weights and mass densities of the elements
iii) 1
st and 2
nd Ionization potentials and electron affinities of the elements
iv) Work-functions of elemental solids
v) SIMS detection limits of selected elements
vi) Charged particle beam transport
vii) Statistical properties
viii) SIMS instrument designs
ix) Additional SIMS methods of interest
x) Additional spectrometric/spectroscopic techniques
xi) Additional microscopic techniques
xii) Diffraction / reflection techniques
Technique acronym list
Abbreviations commonly used in SIMS
Glossary of terms
Questions and answers
References
Index
Notes