Synopses & Reviews
Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. Wafer Fabrication: Performance and Analysis provides this perspective. The book presents a complete treatment of both the technology of wafer fabrication and the factories where it occurs, while presenting methods for the analysis and prediction of the performance of these factories. Offering a comprehensive understanding of the `wafer fab' process, Wafer Fabrication: Performance and Analysis will be of immense use to the wide range of engineers and managers in the electronics industry.
Table of Contents
About the authors. Preface. 1. Introduction to the Electronic Industry. 2. Factory Phenomena. 3. Processes for Wafer Fabrication. 4. Fab Graphs and Static Analyses. 5. Factory Performance Basics. 6. Advanced Performance Concepts. 7. Factory Modeling. 8. Cluster Tools. 9. Performance Economics. Index.