Synopses & Reviews
Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.
Synopsis
Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.
Table of Contents
Microelectronics Processing
Theory of Transport Processes in Semiconductor Crystal Growth from the Melt
Liquid-Phase Epitaxy and Phase Diagrams of Compound Semiconductors
Physical Vapor Deposition Reactors
Chemical Vapor Deposition
Diffusion and Oxidation of Silicon
Resists in Microlithography
Plasma-Enhanced Etching and Deposition
Interconnection and Packaging of High-Performance Integrated Circuits
Semiconductor Processing Problems Solved by Wet (Solution) Chemistry