Synopses & Reviews
Electrical Characterization of Silicon-on-Insulator Materials and Devices describes a wide variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. Each technique comes with pertinent technical information -- experimental set-up, basic models, parameter extraction -- that can be immediately useful to the reader. Electrical Characterization of Silicon-on-Insulator Materials and Devices provides a comprehensive and accessible treatment of all aspects of the latest SOI technologies, including material synthesis, device physics, characterization, circuit applications, and reliability issues. Both the academic researchers and engineers working on the SOI technology will find this book invaluable as a source of pertinent scientific information, practical details, and references. For people planning to enter the SOI field, this book offers a unique coverage of the SOI technology and an attractive presentation of the underlying concepts. This book may also be used as a graduate level textbook for students who wish to learn more about the physics, applications, and electrical characterization of SOI devices.
Synopsis
Silicon on Insulator is more than a technology, more than a job, and more than a venture in microelectronics; it is something different and refreshing in device physics. This book recalls the activity and enthu- siasm of our SOl groups. Many contributing students have since then disappeared from the SOl horizon. Some of them believed that SOl was the great love of their scientific lives; others just considered SOl as a fantastic LEGO game for adults. We thank them all for kindly letting us imagine that we were guiding them. This book was very necessary to many people. SOl engineers will certainly be happy: indeed, if the performance of their SOl components is not always outstanding, they can now safely incriminate the relations given in the book rather than their process. Martine, Gunter, and Y. S. Chang can contemplate at last the amount of work they did with the figures. Our SOl accomplices already know how much we borrowed from their expertise and would find it indecent to have their detailed contri- butions listed. Jean-Pierre and Dimitris incited the book, while sharing their experience in the reliability of floating bodies. Our families and friends now realize the SOl capability of dielectrically isolating us for about two years in a BOX. Our kids encouraged us to start writing. Our wives definitely gave us the courage to stop writing. They had a hard time fighting the symptoms of a rapidly developing SOl allergy.
Table of Contents
1. Introduction. 2. Methods of Forming SOI Wafers. 3. SOI Devices. 4. Wafer Screening Techniques. 5. Transport Measurements. 6. SUS Capacitor Based Characterization Techniques. 7. Diode Measurements. 8. Transistor Characteristics. 9. Transistor Based Characterization Techniques. 10. Monitoring the Transistor Degradation. Index.