Synopses & Reviews
Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.
Review
"The editors have done an excellent job in providing a handbook that will help companies maintain their competitive advantage now and into the future. û Wolfgang Menz, The Albert Ludwig University
Synopsis
This book is the first to present cohesive guidance on the design and analysis of micro-electro-mechanical systems. 17 chapters by international experts cover: transducer operations, topology simulation, and modeling, free-space microsystems, interface circuitry, magnetic, mechanical, chemical, thermal, and fluid microsensors, biomedical microsystems, integrated micro-optics, microactuators, micromachining, plus production issues inautomotive, biomedical, consumer, building, and industrial products.
About the Author
Jan G. Korvink holds the Chair for Microsystem Technology, specializing in MEMS modeling and low cost MEMS fabrication, at IMTEK & The Institute for Microsystem Technology & University of Freiburg, Germany. Dr. Korvink has authored and co-authored more than 120 technical publications including 6 book chapters in the MEMS area and one book. He was a founder of the Swiss company NM Numerical Modeling. He serves on the technical program committees of the following international conferences: Nanotech, DTIP, ESSDERC, EUROSIME, Eurosensors.Oliver Paul holds the Chair for Microsystem Materials at IMTEK & The Institute for Microsystem Technology & University of Freiburg, Germany. His group focusses on MEMS materials, technologies, and devices. He is a co-author of more than 120 technical publications, two patents, and two books. He is a member of the editorial board of Sensors and Actuators A, has co-founded the Swiss MEMS company Sensirion, has served on the technical program committees of numerous European and international conferences, and is member of the Steering Committee of the IEEE MEMS conference.
Table of Contents
Introduction
Microtransducer Operation
Material Properties: Measurement and Data
MEMS and MEMS Simulation
System-Level Simulation of Microsystems
Thermal Based Sensors
Photon Detectors
Free-Space Optical MEMS
Integrated Micro-Optics
Magnetic Microsensors
Mechanical Microsensors
Semiconductor-Based Chemical Microsensors
Microfluidics
Biomedical Microsystems
Microactuators
Micromachining Technology
Interface Circuitry and Microsystems
Index