Synopses & Reviews
This book, the only one of its kind on the market, focuses on RF (Radio Frequency) power for use in semiconductor manufacturing equipment that generate a plasma for processing wafers. The concepts, equipment, and techniques covered in this book emphasize industrial applications, but are also applicable to most radio communications equipment. Topics covered in this unique book are: signal sources, RF power amplifier fundamentals, high power RF amplifiers, impedance matching, transmission lines, smith charts, power measurement and control, troubleshooting and maintenance of RF power systems, and industrial applications of RF power. This book is useful for engineers and technicians who install, operate, maintain, service, and repair RF power generating equipment. It is also useful for continuing education courses in company training programs, industrial training courses, or seminars and workshops.
Synopsis
This unique text emphasizes radio frequency power for industrial applications such as industrial heating, MRIs, and generating plasmas in semiconductor manufacturing equipment.
RF Power for Industrial Applications presents topics from the semiconductor manufacturing perspective, making it useful for both the student and the engineer.
Users should have completed courses in DC and AC circuits, semiconductor device fundamentals, basic electronic circuits (amplifiers, power supplies, and oscillators), and basic test and measurement techniques.
The accompanying lab manual (ISBN 0-13-096576-6) provides hands-on exercises and reinforces the concepts learned in the text.
Table of Contents
1. Introduction.
2. Signal Sources.
3. RF Power Amplifier Fundamentals.
4. High Power RF Amplifiers.
5. Impedance Matching.
6. Introduction to Transmission Lines.
7. Smith Charts.
8. Power Measurement and Control.
9. Troubleshooting and Maintaining RF Power Systems.
10. Industrial Applications of RF Power.